Fabrication of interdigitated electrodes by inkjet printing technology for apllication in ammonia sensing

Duy Dam Le, Thi Ngoc Nhien Nguyen, Duc Chanh Tin Doan, Thi My Dung Dang and Mau Chien Dang

Abstract

In this paper interdigitated electrodes for gas sensors were fabricated by inkjet printing technology. Silver electrodes were inkjet printed on Si/SiO₂ substrates instead of traditional photolithography method. The inkjet printing parameters to obtain desired dimensions, thickness of the electrodes and distance between the interdigitated electrodes were optimized in this study. The fabricated interdigitated silver electrodes were tested for application in ammonia gas sensors. Conductive polyaniline (PANI) layer was coated on the silver interdigitated electrodes by drop-coating. Ammonia detection of the PANI-coated chips was characterized with a gas measurement system in which humidity and ammonia concentrations were well-controlled. The electrical conductivity of the PANI films coated on the electrodes was measured when the PANI films were exposed to nitrogen and ammonia. The conductivity of the PANI films decreased significantly due to the deprotonation process of PANI upon ammonia expodure. The recovery time was about 15 min by heating up the polymer chip at 60 °C. The results showed that the silver electrodes fabricated by inkjet printing technique could be used as a sensor platform for ammonia detection