The formation of micrometer-long TiO2 nanotube arrays by anodization of titanium film on conducting glass substrate

Yuxin Tang, Jie Tao, Zhili Dong, Joo Tien Oh and Zhong Chen

  • ANSN Editor
Keywords: nano


Micrometer-long titanium oxide nanotube arrays, tens of nanometers in diameter, were fabricated by anodization of titanium film coated on a conducting glass substrate. The Ti film was deposited by magnetron sputtering at room temperature. The effect of anodizing conditions on the formation of TiO2 nanotubes was investigated. The results indicate that dense and uniform Ti film deposited under 150 W at room temperature was favorable for the formation of ordered nanotube arrays. The average diameter of the TiO2 nanotubes varied from 35 to 95 nm when the anodization potential changed from 10 to 40 V. Micrometer-long nanotubes (1.1 μm) with good adhesion to the substrate could be obtained in 0.5 wt% NH4F/glycerol at 30 V for 2 h. After heat treatment, the crystalline anatase nanotubes show enhanced photoelectrochemical activity compared with those anodized in 1 M H3PO4/0.5 wt% HF. This is attributed to the increased light-harvesting abilities

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